Abrasive Agglomeration(Poor slurry dispersion may affect polishing consistency and surface quality during precision finishing procedures.)
-Unstable Surface Finish(Inconsistent particle distribution may influence material removal uniformity during polishing processes.)
-Material Compatibility Challenges(Different materials such as sapphire, SiC, ceramics, and semiconductors require different slurry chemistries and abrasive systems.)
-Process-Specific Polishing Requirements(Rough lapping, precision polishing, and CMP applications require different particle sizes, lubrication properties, and chemical formulations.)
The effects on polishing pads differ: Oil-based liquids can cause some synthetic polishing pads to “swell” or soften, damaging the pad’s pore structure and leading to uneven polishing pressure distribution.
Water-based liquids do not damage most polishing pads, but if the pad was originally designed for an oil-based system, switching to a water-based system may result in insufficient lubrication and deeper scratches.
The effects on workpieces differ:
Oil-based: Suitable for water-sensitive materials (such as certain metals and crystals), but thorough cleaning with organic solvents is necessary after polishing; residual oil film can affect subsequent processes (such as coating and bonding).
Water-based: Suitable for workpieces requiring subsequent surface cleaning (such as semiconductor wafers and optical lenses), but if used on easily rusting metals (such as iron and ordinary steel), sufficient rust inhibitors must be ensured in the polishing slurry. Water-based polishing slurries require more efficient dispersants and suspension stabilization technology. Inferior water-based products are prone to “layering and sedimentation,” leading to uneven abrasive distribution during polishing.
-Sapphire Lapping & Polishing:Precision finishing for sapphire wafers and optical components.
Silicon Carbide (SiC) Processing: Lapping and polishing for SiC wafers and ceramic materials.
Semiconductor CMP Processes: CMP slurry systems for wafer polishing applications.
Optical Glass Polishing: Precision polishing for optical and photonic components.
Precision Ceramic Finishing: Surface lapping and polishing for advanced ceramic materials.
Precision Metal Surface Finishing: Lapping and fine polishing for hardened metal components.
| Type | Crystal Type | Particle Size (μm) | Volume | |
|---|---|---|---|---|
| Oil-based | Monocrystalline/Polycrystalline | 0.1μm | 500 ml | |
| Oil-based | Monocrystalline/Polycrystalline | 0.25μm | 500 ml | |
| Oil-based | Monocrystalline/Polycrystalline | 1.0μm | 500 ml | |
| Oil-based | Monocrystalline/Polycrystalline | 3.0μm | 500 ml | |
| Oil-based | Monocrystalline/Polycrystalline | 6.0μm | 500 ml | |
| Oil-based | MonocrystallinPolycrystalline | 9.0μm | 500 ml | |
| Oil-based | Monocrystalline/Polycrystalline | 15.0μm | 500 ml | |
| Oil-based | Monocrystalline/Polycrystalline | 30.0μm | 500 ml | |
| Oil-based | Monocrystalline/Polycrystalline | 45.0μm | 500 ml | |
| Water-based | Monocrystalline/Polycrystalline | 0.1μm | 500 ml | |
| Water-based | Monocrystalline/Polycrystalline | 0.25μm | 500 ml | |
| Water-based | Monocrystalline/Polycrystalline | 1.0μm | 500 ml | |
| Water-based | Monocrystalline/Polycrystalline | 3.0μm | 500 ml | |
| Water-based | Monocrystalline/Polycrystalline | 6.0μm | 500 ml | |
| Water-based | Monocrystalline/Polycrystalline | 9.0μm | 500 ml | |
| Water-based | Monocrystalline/Polycrystalline | 15.0μm | 500 ml |